Lattice parameters of GaN layers grown on <i>a</i>-plane sapphire: Effect of in-plane strain anisotropy

Abstract

We have studied GaN films grown on a-plane sapphire by hydride vapor phase epitaxy and metalorganic vapor phase epitaxy. The in-plane lattice parameter was determined from sets of equivalent interplanar distances measured for six different directions in order to examine the effect of strain anisotropy. It is found that, in both types of films, the obtained six values of the in-plane lattice parameter can be grouped around two values. The strain anisotropy is estimated to have different value in the films grown by the two techniques and possible explanations are suggested.