SIO2 thin film preparation using dielectric barrier discharge-driven excimer lamps

Ablation of Polymers and Biological Tissue by Ultraviolet Lasers

R. Srinivasan · Science · 1986 · 564 citations

Engineering, Biomedical Engineering, Materials Engineering +15

Silent-discharge driven excimer UV sources and their applications

U. Kogelschatz · Applied Surface Science · 1992 · 173 citations

Engineering, Materials Engineering, Materials Science +7

Modification of surfaces with new excimer UV sources

Hilmar Esrom, U. Kogelschatz · Thin Solid Films · 1992 · 95 citations

Natural Sciences, Materials Engineering, Materials Science +12

New high-efficiency quasi-continuous operation of an ArF(<i>B</i>→<i>X</i>) excimer lamp excited by microwave discharge

Hiroshi Kumagai, Minoru Obara · Applied Physics Letters · 1989 · 50 citations

Engineering, Electrical Engineering, Optoelectronics +14

Direct photo-deposition of silicon dioxide films using a xenon excimer lamp

P. Bergonzo, U. Kogelschatz, Ian W. Boyd · Applied Surface Science · 1993 · 48 citations

Engineering, Materials Engineering, Materials Science +15