Silent-discharge driven excimer UV sources and their applications

Modeling and applications of silent discharge plasmas

Bengt Eliasson, U. Kogelschatz · IEEE Transactions on Plasma Science · 1991 · 817 citations

Natural Sciences, Electrical Engineering, Physics +17

Self-developing photoetching of poly(ethylene terephthalate) films by far-ultraviolet excimer laser radiation

R. Srinivasan, V. Mayne-Banton · Applied Physics Letters · 1982 · 708 citations

Natural Sciences, Materials Engineering, Materials Science +14

UV excimer radiation from dielectric-barrier discharges

Bengt Eliasson, U. Kogelschatz · Applied Physics B · 1988 · 325 citations

Natural Sciences, Electrical Engineering, Materials Science +6

Dynamics of UV laser ablation of organic polymer surfaces

E. Sutcliffe, R. Srinivasan · Journal of Applied Physics · 1986 · 306 citations

Natural Sciences, Materials Engineering, Materials Science +17

Generation of excimer emission in dielectric barrier discharges

B. Gellert, U. Kogelschatz · Applied Physics B · 1991 · 212 citations

Natural Sciences, Electrical Engineering, Physics +5