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High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications

Stefan Zappe, Jeff Franklin, Martin Eickhoff, H.J. Möller, G. Krötz, C. Rougeot, O. Lefort, J. Stoëmenos

Materials science forum · 2001 · 13 citations · 0 references

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