Publication | Open Access

Advanced Si-based substrates for RF passive integration: Comparison between local porous Si layer technology and trap-rich high resistivity Si

Rf Passive IntegrationElectrical EngineeringEngineeringRf SemiconductorNanoelectronicsApplied PhysicsAdvanced Si-based SubstratesSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsInterconnect (Integrated Circuits)Semiconductor Device