A novel method to determine electron density by optical emission spectroscopy in low-pressure nitrogen plasmas

Abstract

A novel method to determine volume averaged electron density by optical emission spectroscopy is investigated in inductively coupled nitrogen plasma. Using a kinetic model of low-pressure nitrogen discharge, volume averaged electron density can be obtained from experimentally measured vibrational distribution of the excited state C3Πu of the nitrogen molecule. Electron density versus rf power determined by this method and Langmuir probe measurement is compared and found to be in good agreement.