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On the structure and surface chemical composition of indium–tin oxide films prepared by long-throw magnetron sputtering

Materials ScienceMagnetic PropertiesEngineeringSurface Chemical CompositionOxide ElectronicsSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsLong-throw Magnetron SputteringChemical DepositionChemical Vapor DepositionThin Film ProcessingIndium–tin Oxide Films