A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback

Developing a linear piezomotor with nanometer resolution and high stiffness

B. Zhang, Zaisheng Zhu · IEEE/ASME Transactions on Mechatronics · 1997 · 142 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +15

<title>Design and performance of a high-force piezoelectric inchworm motor</title>

Jeremy Frank, Gary H. Koopmann, Wei‐Cheng Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 40 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +16

Design of a linear piezomotor with ultra-high stiffness and nanoprecision

Jun Ni, Zhenyu Zhu · IEEE/ASME Transactions on Mechatronics · 2000 · 40 citations

Engineering, Materials Science, Mechanical Engineering +16

Dual mode phase measurement for optical heterodyne interferometry

Noh-Bin Yim, Cheon Il Eom, Seung‐Woo Kim · Measurement Science and Technology · 2000 · 37 citations

Engineering, Electrical Engineering, Instrumentation +16

Ultra-precision wafer positioning by six-axis micro-motion mechanism.

Motoya TANIGUCHI, Minoru Ikeda, Akira Inagaki et al. · Journal of the Japan Society for Precision Engineering · 1990 · 26 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +17