Developing a linear piezomotor with nanometer resolution and high stiffness

Abstract

A novel linear piezomotor was developed for machine tool applications. The design principles and methodology for this high stiffness linear piezomotor with nanometer resolution are presented. The linear piezomotor consists of three piezoelectric actuators and one monolithic flexure frame. The design strategy is to reduce the total number of mechanical elements and interfaces and to integrate all the elements into the frame. The finite element method is used in the design process. The principles and methodology are also applicable to other positioning systems where a high stiffness and high positioning resolution are required.