Concepedia
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Publications
1
Citations
26
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Active since
1990
Motoya TANIGUCHI is an author specializing in piezoelectric actuators, microelectromechanical actuators, and precision positioning mechanisms.
Publications per year
1990–1990
Ultra-precision wafer positioning by six-axis micro-motion mechanism.
Motoya TANIGUCHI, Minoru Ikeda, Akira Inagaki et al. · Journal of the Japan Society for Precision Engineering · 1990 · 26 citations · Full text
Engineering, Mechanical Engineering, Mechatronics Engineering +17
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