Effect of oxygen inclusion on microstructure and thermal stability of copper nitride thin films

Copper nitride and tin nitride thin films for write-once optical recording media

Toshiro Maruyama, Tomonori Morishita · Applied Physics Letters · 1996 · 206 citations

Materials Science, Optical Materials, Engineering +14

Cu₃N Thin Film for a New Light Recording Media

M. Asano, K. Umeda, Akira Tasaki · Japanese Journal of Applied Physics · 1990 · 171 citations

Materials Science, Reflection Coefficient, Engineering +12

Copper nitride thin films prepared by radio-frequency reactive sputtering

Toshiro Maruyama, Tomonori Morishita · Journal of Applied Physics · 1995 · 147 citations

Materials Science, Materials Engineering, Material Analysis +11

Deposition of crystalline binary nitride films of tin, copper, and nickel by reactive sputtering

L. Maya · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 138 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Thermal stability of copper nitride films prepared by rf magnetron sputtering

Z.Q Liu, W.J Wang, T.M Wang et al. · Thin Solid Films · 1998 · 126 citations

Materials Science, Materials Engineering, Aluminium Nitride +10