High-efficiency fabrication of aspheric microlens arrays by holographic femtosecond laser-induced photopolymerization

Abstract

Manufacture of aspheric microlens has always been technically challenging for conventional approaches due to their complex curved profile and tiny sizes. Two-photon polymerization is capable of producing arbitrary shape with high spatial resolution, apart from the disadvantage of ultra-low rate of yield resulting from point-by-point writing strategy. Here, we report parallel fabrication of aspheric microlens arrays (AMLAs) by taking advantage of holographic femtosecond laser direct-writing. The inherent constraints of the spatial light modulator are taken into consideration for achieving improved intensity uniformity and enhanced diffraction efficiency. Closely-packed AMLAs with designable optical parameters are readily fabricated with excellent optical performance.