Concepedia

Width, structure and stability of sheaths in metal plasma immersion ion implantation and deposition: measurements and analytical considerations

André Anders

Surface and Coatings Technology · 2001 · 50 citations · 19 references

DOI

Concepts

References

19

The Characteristics of Electrical Discharges in Magnetic Fields

Journal of the American Medical Association · 1950 · 1.1K citations

, , +6

The characteristics of electrical discharges in magnetic fields

S. Charp · Journal of the Franklin Institute · 1950 · 709 citations

, , +6

Analysis of the Electrode Products Emitted by dc Arcs in a Vacuum Ambient

William D. Davis, H. Craig Miller · Journal of Applied Physics · 1969 · 544 citations

, , +10

Ion charge state distributions of vacuum arc plasmas: The origin of species

André Anders · Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics · 1997 · 342 citations

, , +15

Model of plasma immersion ion implantation

M. A. Lieberman · Journal of Applied Physics · 1989 · 292 citations

, , +7