Publication | Closed Access
Structural studies of ultrathin silicon oxides and their interfaces by XPS
15
Citations
15
References
1990
Year
Materials ScienceMaterials EngineeringEngineeringOxide ElectronicsApplied PhysicsUltrathin Silicon OxidesSemiconductor MaterialSemiconductor Device FabricationStructural StudiesMicroelectronicsSilicon On Insulator
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