Concepedia

Publication | Open Access

Strain characterisation of shallow trench isolation structures on a nanometer scale by convergent beam electron diffraction

DOIFull Paper Access

11

Citations

3

References

2001

Year

A. Armigliato, R. Balboni, Stefano Frabboni, A. Benedetti, A. G. Cullis, G.P. Carnevale, P. Colpani, G. Pavia
Materials Science in Semiconductor Processing

References

YearCitations

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