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Effect of substrate bias on the properties of microcrystalline silicon films deposited in a glow discharge

Materials ScienceElectrical EngineeringEngineeringSubstrate BiasMicrofabricationGlow DischargeSurface ScienceApplied PhysicsMicrocrystalline Silicon FilmsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsThin Film Processing