Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD Based on Laser Trapping Technique

Observation of a single-beam gradient force optical trap for dielectric particles

A. Ashkin, J. M. Dziedzic, J. E. Bjorkholm et al. · Optics Letters · 1986 · 7K citations

Natural Sciences, Physics, Nanotechnology +6

Micro Engineering

Leo Alting, F. Kimura, Hans Nørgaard Hansen et al. · CIRP Annals · 2003 · 347 citations

Design for a Compact High-Accuracy CMM

G.N. Peggs, Andrew Lewis, S. Oldfield · CIRP Annals · 1999 · 130 citations

Engineering, Electrical Engineering, Instrumentation +8

Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring Machines

H. Schwenke, F. Wäldele, Ch. Weiskirch et al. · CIRP Annals · 2001 · 101 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +11

Development of a Silicon-based Nanoprobe System for 3-D Measurements

Han Haitjema, W.O. Pril, P.H.J. Schellekens · CIRP Annals · 2001 · 89 citations

Engineering, Materials Engineering, Materials Science +14