Sensors and Actuators A Physical · 1999 · 46 citations · 19 references
EngineeringMechanical EngineeringPhysicsActuatorsElectromagnetismFluid DynamicsActuator DesignActuator DynamicsMagnetic ActuationMagnetic ActuatorsElectroplated MaterialsMagnetic Actuator DesignMagnetic Actuator MaterialsOut-of-plane ActuatorsOut-of-plane Magnetic ActuationSoft Magnetic Actuators
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Mario Lee, Chih‐Ming Ho · Applied Mechanics Reviews · 1990 · 150 citations
Engineering, Aerospace Engineering, Mechanical Engineering +16
The effect of release-etch processing on surface microstructure stiction
Robert L. Alley, G.J. Cuan, Roger T. Howe et al. · 2003 · 142 citations