Publication | Closed Access
Deposition of nanocryctalline silicon thin films: Effect of total pressure and substrate temperature
15
Citations
27
References
2007
Year
Materials ScienceEngineeringMicrofabricationNanotechnologySurface ScienceApplied PhysicsSubstrate TemperatureThin FilmsTotal PressureChemical Vapor DepositionThin Film Processing
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