Superconductor Science and Technology · 1991 · 78 citations · 9 references
Natural SciencesElectrical EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesThin FilmsSemiconductor PhysicsSuperconducting Thin FilmsThin Film Electrical PropertiesCritical Current DensityCritical Current PerformanceFilm ThicknessHigh-temperature Superconducting FilmsJunction ResistanceMagnetic Field DependencePhotolithographic PatterningYttrium Barium Copper Oxide Films
The authors have fabricated and characterized thin film YBa2Cu3O7 step-edge microbridges for application in SQUIDS. Epitaxial YBCO films were pulsed-laser-deposited on SrTiO3 and had Tc's of 88-90 K. Sharp steps in SrTiO3 were obtained by photolithographic techniques and Ar ion milling with step heights (h) between 100 and 250 mm. They investigated step-edge junctions (SEJ) with different film thicknesses (d) from 100 to 250 mm but with a constant ratio d/h=1. The width of the microbridges was 2-2.5 mu m. The Tc's of the bridges were 65-85 K, depending on film thickness and the duty cycle during ion milling. The I-V curves were RSJ-like and clear Shapiro steps were observed. The junction normal resistance was independent of temperature. With applied magnetic field the critical current Ic showed a T-dependent modulation, indicating that there was self-shielding and Ic non-uniformity in the junctions. Low-frequency noise measured in RF SQUIDS was relatively low. They showed that it was generated predominantly in the junctions.
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Substrate step-edge YBa2Cu3O7 rf SQUIDs
K.P. Daly, W. D. Dozier, J.F. Burch et al. · Applied Physics Letters · 1991 · 133 citations
R. W. Simon, J.B. Bulman, J.F. Burch et al. · IEEE Transactions on Magnetics · 1991 · 62 citations
Natural Sciences, Electrical Engineering, Materials Science +9