Nuclear Instruments and Methods · 1978 · 45 citations · 2 references
EngineeringElectrical EngineeringPhysicsElectromagneticsMicrofabricationOpticsMems DesignMems FabricationMems MaterialsMicrofabrication MaterialsBeam Focusing Lenses
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Collimation of ion beams to micrometer dimensions
R. Nobiling, Y. Civelekoǧlu, Bogdan Povh et al. · Nuclear Instruments and Methods · 1975 · 74 citations
The use of focused ion beams for analysis
J.A. Cookson, F. D. Pilling · Thin Solid Films · 1973 · 40 citations