Multicolor Photoluminescence from Porous Silicon Using Focused, High‐Energy Helium Ions

Abstract

An image of a dragon is replicated in porous silicon by using 2 MeV helium irradiation prior to electrochemical etching. By careful control of the ion dose at each region, the photoluminescence (PL) wavelength can be tuned to produce a PL image matching that of the original. Results have been explained in terms of ion-induced changes in the wafer resistivity.