Publication | Closed Access
Effect of nitrogen partial pressure on Al–Ti–N films deposited by arc ion plating
77
Citations
31
References
2011
Year
Materials ScienceMaterials EngineeringArc Ion PlatingEngineeringSurface ScienceApplied PhysicsNitrogen Partial PressureAl–ti–n FilmsThin Film Process TechnologyThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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