Publication | Closed Access
Surface-superlattice effects in a grating-gate GaAs/GaAlAs modulation doped field-effect transistor
79
Citations
10
References
1988
Year
SemiconductorsSemiconductor TechnologyElectrical EngineeringElectronic DevicesSurface-superlattice EffectsEngineeringPhysicsWide-bandgap SemiconductorCategoryquantum ElectronicsElectronic EngineeringSemiconductor DeviceApplied PhysicsQuantum MaterialsOptoelectronic DevicesX-ray LithographySuperlattice EffectCommon Continuous GateQuantum Engineering
We report transport phenomena exhibited by a two-dimensional electron gas at the interface of a modulation doped GaAs/GaAlAs heterostructure in the presence of a field-effect-controlled periodic potential modulation. By means of x-ray lithography and lift-off, a 0.2-μm-period Schottky barrier grating gate was fabricated in lieu of the common continuous gate in a field-effect transistor configuration. Conductance measurements at 4.2 K provide evidence of a superlattice effect.
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