Damage accumulation in ceramics during ion implantation

C.J. McHargue, G. C. Farlow, G. M. Bègun, J.M. Williams, C. W. White, B. R. Appleton, P. S. Sklad, P. Angelini

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 63 citations · 28 references

Concepts

References

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