Towards Pick-and-Place Assembly of Nanostructures

Abstract

We examine an approach to three-dimensional pick-and-place assembly of wire-like nanoscale components, such as carbon nanotubes and silicon nanowires, on microstructures inside a scanning electron microscope. In this article we demonstrate that microfabricated electrostatically acutuated tweezers can pick up silicon nanowires and show how electron beam deposition of carbon residues can be used to assemble carbon nanotubes on microelectrodes.