MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive

Micromachined electro-mechanically tunable capacitors and their applications to RF IC's

A. Dec, K. Suyama · IEEE Transactions on Microwave Theory and Techniques · 1998 · 250 citations

Engineering, Electrical Engineering, Microelectronics +16

A high-Q tunable micromechanical capacitor with movable dielectric for RF applications

Jun‐Bo Yoon, Clark T.‐C. Nguyen · 2002 · 72 citations

Engineering, Electrical Engineering, Materials Science +17

A Micromachined Variable Capacitor for Monolithic Low-Noice VCOS

Darrin J. Young, Bernhard E. Boser · 1996 · 41 citations · Full text

Engineering, Electrical Engineering, Analog Electronics +16

Copper/polyimide fabrication process for above-IC integration of high quality factor inductors

M. B. Pisani · Microelectronic Engineering · 2004 · 12 citations · Full text

Engineering, Electrical Engineering, Materials Engineering +10