Publication | Closed Access
Polysilicon micromechanical gratings for optical modulation
15
Citations
3
References
1996
Year
PhotonicsOptical MaterialsEngineeringMicrofabricationOptical PropertiesApplied PhysicsMicro-optical ComponentPolysilicon Micromechanical GratingsDiffractive Optic
| Year | Citations | |
|---|---|---|
Page 1
Page 1