Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique

Abstract

Spatially resolved measurements of the ion density and electron temperature in a dual-frequency capacitively coupled Ar discharge plasma are performed with a newly developed complete floating double probe. Axial and radial distributions of the ion density and electron temperature under various high-frequency (HF) power and gas pressure were studied in detail. Both the ion density and the electron temperature increased with increasing HF power. With increasing gas pressure from 1.3 to 9.3 Pa, the radial profile of ion density below the driven electrode experienced a change from “bimodal” to “unimodal” shape, with better uniformity being achieved at the optimal pressure of about 5 Pa. In addition, changing the axial profile of ion density was also observed with the peak shift toward the powered electrode at higher pressures. The measured results showed satisfying consistency with that of improved two dimensional fluid simulations.