Concepedia

Publication | Closed Access

High-density inductively coupled plasma chemical vapor deposition of silicon nitride for solar cell application

DOI

26

Citations

0

References

2002

Year

I.O. Parm, K Kim, D.G. Lim, J.H Lee, Jongkyu Heo, J Kim, D.S Kim, S.H Lee, Junsin Yi
Solar Energy Materials and Solar Cells

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