Tabletop soft-x-ray Fourier transform holography with 50 nm resolution

Abstract

We present what we believe to be the first implementation of Fourier transform (FT) holography using a tabletop coherent x-ray source. By applying curvature correction to compensate for the large angles inherent in high-NA coherent imaging, we achieve image resolution of 89 nm using high-harmonic beams at a wavelength of 29 nm. Moreover, by combining holography with iterative phase retrieval, we improve the image resolution to <53 nm. We also demonstrate that FT holography can be used effectively with short exposure times of 30 s. This technique will enable biological and materials microscopy with simultaneously high spatial and temporal resolution on a tabletop soft-x-ray source.