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Silver (Ag) as a novel masking material in glass etching for microfluidics applications

Materials ScienceEngineeringMicrofabricationMaterials FabricationMicrofluidics ApplicationsSurface ScienceGlass EtchingLab-on-a-chipBiomedical EngineeringNanofabricationMicro-optical ComponentMicrofluidicsPlasma EtchingNanolithography Method