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Indentation modulus and hardness of viscoelastic thin films by atomic force microscopy: A case study

Materials ScienceAtomic Force MicroscopyEngineeringMicromechanicsMicrofabricationMechanicsMechanical BehaviorMechanical EngineeringApplied PhysicsViscoelastic Thin FilmsScanning Force MicroscopyIndentation ModulusThin FilmsNanotribologyNanomechanicsMechanics Of Materials