Blue-Green InGaN/GaN Laser Diodes on Miscut<i>m</i>-Plane GaN Substrate

Abstract

Nonpolar blue-green (481 nm) InGaN/GaN laser diodes (LDs) were realized by using m-plane GaN substrates with a misorientation angle of approximately 1° toward [0001] direction. The laser diode structures grown on miscut m-plane GaN substrates showed significantly smoother surface morphology compared to structures grown on nominally on-axis m-plane GaN substrates. It is contributed to lower threshold current densities, longer lasing wavelength, and higher lasing yield than those on on-axis substrates grown by the same growth condition. Material improvement based on the control of substrate misorientation is essential to achieve high performance LDs beyond the blue spectral range.