Development of Phosphorus Liquid-Metal-Ion Source

Abstract

A phosphorus liquid-metal-ion source that uses a Cu–P alloy as its source material is described. The P + ion emission current is about 10% of total emission current, which consists mainly of Cu + ions. Energy spread of P + ions is 25 eV at a total current of 30 µA, while that of Cu + is 28 eV. A source lifetime of more than 20 hours is achieved at a total current of 50–60 µA.