Concepedia

Publication | Closed Access

Chemical patterning of sub-50-nm half pitches via nanoimprint lithography

DOI

14

Citations

10

References

2005

Year

Sunggook Park, Sina Saxer, Celestino Padeste, Harun H. Solak, J. Gobrecht, Helmut Schift
Microelectronic Engineering

References

YearCitations

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