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Correlation between silicon hydride species and the photoluminescence intensity of porous silicon
257
Citations
17
References
1992
Year
Chemical EngineeringPhotoluminescenceEngineeringSurface ScienceApplied PhysicsSilicon Hydride SpeciesPhotoluminescence IntensityPredominate Sih TerminationPorous SiliconChemistrySih2 TerminationLuminescence PropertyOptoelectronicsSilicon On Insulator
The role of silicon hydride species in the photoluminescence intensity behavior of porous Si has been studied. The surfaces of luminescent porous Si samples were converted to a predominate SiH termination using a remote H plasma. The as-passivated samples were then immersed in various concentrations of hydrofluouric solutions to regulate the recovery of SiH2 termination on the surface. Photoluminescence measurements and transmission Fourier-transform infrared spectroscopy have shown that predominant silicon monohydride (SiH) termination results in weak photoluminescence. In contrast, it has been observed that the appearance of silicon dihydride (SiH2) coincides with an increase in the photoluminescence intensity.
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