Concepedia

Open questions in surface topography measurement: a roadmap

Richard Leach, C. J. Evans, Liangyu He, Angela Davies, Angela Duparré, Andrew Henning, Christopher W. Jones, Daniel O’Connor

Surface Topography Metrology and Properties · 2015 · 61 citations · 28 references

Concepts

EngineeringManufacturing EngineeringMetrologySurface EngineeringSurface ScienceForm MeasurementForm MetrologySurface AnalysisSurface CharacterizationSurface MetrologySurface TopographyData Analysis In Surface MetrologySurface Form MeasurementSurface Profile MeasurementSurface ProfilometrySurface Topography Characterization

Abstract

Art. 013001, 16 S.

References

28

Computational electrodynamics, the finite-difference time-domain method

M. Rycroft · Journal of Atmospheric and Terrestrial Physics · 1996 · 9.5K citations

Computing, Electrical Engineering, Physics +14

Introduction to Fourier Optics

Elisha Huggins · The Physics Teacher · 2007 · 1.8K citations

Natural Sciences, Electrical Engineering, Physics +17

Handbook of Surface Metrology

Precision Engineering · 1994 · 718 citations

Engineering, Materials Engineering, Materials Science +12

Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components

Angela Duparré, Josep Ferré‐Borrull, Stefan Gliech et al. · Applied Optics · 2002 · 375 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Relationship between Surface Scattering and Microtopographic Features

E. L. Church, H. A. Jenkinson, J. M. Zavada · Optical Engineering · 1979 · 286 citations

Natural Sciences, Materials Science, Physics +17