Publication | Closed Access
Low temperature formation of microcrystalline silicon films using high-density SiH4 microwave plasma
16
Citations
12
References
2001
Year
Materials ScienceElectrical EngineeringEngineeringMicrofabricationApplied PhysicsSemiconductor Device FabricationLow Temperature FormationSilicon On InsulatorMicrocrystalline Silicon FilmsPlasma ProcessingThin Film Processing
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