Microsystem Technologies · 2006 · 12 citations · 1 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSurface ScienceAdhesive BondingMicrofabrication MaterialsWafer BondingAdhesivenessAdhesivesBonding Techniques
1
H. Van Brussel, Jan Peirs, Dominiek Reynaerts et al. · CIRP Annals · 2000 · 219 citations