Publication | Closed Access
Dissolution Chemistry and Biocompatibility of Silicon- and Germanium-Based Semiconductors for Transient Electronics
181
Citations
32
References
2015
Year
MiniaturizationEngineeringBiomedical EngineeringSilicon On InsulatorSemiconductor DeviceSemiconductorsChemical EngineeringElectronic PackagingMaterials ScienceSemiconductor TechnologyGermanium-based SemiconductorsSemiconductor MaterialSemiconductor Device FabricationImplantable DeviceMicroelectronicsBiomedical SensorsTransient ElectronicsMicrofabricationDissolution ChemistryBioelectronicsApplied PhysicsPolycrystalline SiliconTemporary Biomedical ImplantsAmorphous SiliconBiomemsBiocompatible Material
Semiconducting materials are central to the development of high-performance electronics that are capable of dissolving completely when immersed in aqueous solutions, groundwater, or biofluids, for applications in temporary biomedical implants, environmentally degradable sensors, and other systems. The results reported here include comprehensive studies of the dissolution by hydrolysis of polycrystalline silicon, amorphous silicon, silicon-germanium, and germanium in aqueous solutions of various pH values and temperatures. In vitro cellular toxicity evaluations demonstrate the biocompatibility of the materials and end products of dissolution, thereby supporting their potential for use in biodegradable electronics. A fully dissolvable thin-film solar cell illustrates the ability to integrate these semiconductors into functional systems.
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