Low-temperature epitaxial growth of Si by electron cyclotron resonance chemical vapor deposition - Concepedia

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Low-temperature epitaxial growth of Si by electron cyclotron resonance chemical vapor deposition

36

Citations

27

References

2001

Year

J. Platen, B. Selle, I. Sieber, S. Brehme, U. Zeimer, W. Fuhs

Thin Solid Films

Epitaxial GrowthPhysicsApplied PhysicsSemiconductor Device FabricationMolecular Beam EpitaxySilicon On InsulatorLow-temperature Epitaxial GrowthChemical Vapor Deposition

References

	Year	Citations

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