Publication | Closed Access
Formation of wide and deep pores in silicon by electrochemical etching
61
Citations
8
References
2000
Year
Materials ScienceElectrochemical EtchingEngineeringNanoporous MaterialMicrofabricationSurface ScienceApplied PhysicsDeep PoresSemiconductor Device FabricationSilicon On InsulatorPlasma Etching
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