Low-temperature/high-temperature AlN superlattice buffer layers for high-quality AlxGa1−xN on Si (111) - Concepedia

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Low-temperature/high-temperature AlN superlattice buffer layers for high-quality AlxGa1−xN on Si (111)

22

Citations

17

References

2009

Year

Phannee Saengkaew, A. Dadgar, Juergen Blaesing, Thomas Hempel, Peter Veit, Juergen Christen, A. Krost

Journal of Crystal Growth

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringApplied PhysicsSemiconductor MaterialMultilayer HeterostructuresHigh-quality Alxga1−xn

References

	Year	Citations

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