Interfacial reaction pathways and kinetics during annealing of epitaxial Al/TiN(001) model diffusion barrier systems - Concepedia

Concepedia

Publication | Closed Access

Interfacial reaction pathways and kinetics during annealing of epitaxial Al/TiN(001) model diffusion barrier systems

18

Citations

23

References

2001

Year

J. S. Chun, P. Desjardins, I. Petrov, J. E. Greene, C. Lavoie, C. Cabral

Thin Solid Films

Materials ScienceEpitaxial Al/tinAluminium NitrideEngineeringDiffusion ResistanceApplied PhysicsInterfacial Reaction PathwaysMolecular Beam EpitaxyAlloy PhaseEpitaxial Growth

References

	Year	Citations

Page 1