Concepedia
Applied Physics A · 1999 · 108 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationOpticsPhotonicsEtching ProcessesLaser Material ProcessingLaser Surface ProcessingMicrofabrication ProcessesMicromachiningMicrostructure ControlExcimer LasersLaser MicromachiningLasersUltrafast Laser MicromachiningWet Etching