Time-resolved acquisition technique for spatially-resolved electron energy-loss spectroscopy by energy-filtering TEM

Abstract

A time-resolved acquisition technique has been investigated for spatially-resolved electron energy-loss spectroscopy by energy-fitering transmission electron microscopy. Plural (10) spectral images were acquired separately at an energy (E) and a position (Y) coordinate. After correction of both specimen and energy drifts by comparing with the original starting spectrum, the 10 spectral images were added to form a new processed spectral image. This time-resolved acquisition technique was found to improve the signal-to-noise ratio to about the square root of ten for 200 s total exposure time without increasing the image blurring problem.