Fabrication of a dielectrophoretic chip with 3D silicon electrodes

Ciprian Iliescu, Guo Lin Xu, Victor Samper, Francis E. H. Tay

Journal of Micromechanics and Microengineering · 2004 · 98 citations · 20 references

Concepts

Abstract

10.1088/0960-1317/15/3/009

References

20