Sensors and Actuators B Chemical · 2001 · 27 citations · 13 references
Electrical EngineeringEngineeringSensorsMicrofabricationGas SensorGas Microsensor ElementsSensor DesignChemistryInstrumentationGas DetectionChemical CrosstalkClose ProximityChemical SensorThermal SensorElectrochemical Gas Sensor
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Fast temperature programmed sensing for micro-hotplate gas sensors
Richard E. Cavicchi, John S. Suehle, K.G. Kreider et al. · IEEE Electron Device Letters · 1995 · 117 citations
Richard E. Cavicchi, John S. Suehle, K.G. Kreider et al. · Sensors and Actuators B Chemical · 1996 · 99 citations
Micro-hotplate Gas Sensors, Specific Response Patterns, Chemical Engineering +14