Concepedia

Sidewall polishing with a gas cluster ion beam for photonic device applications

E. Bourelle, Akiko Suzuki, Akinobu Sato, Toshio Seki, Jiro Matsuo

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2005 · 23 citations · 9 references

DOI

Concepts

References

9

Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides

Sharee J. McNab, Nikolaj Moll, Yurii A. Vlasov · Optics Express · 2003 · 730 citations · Full text

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Fabrication of ultralow-loss Si/SiO_2 waveguides by roughness reduction

Kevin C. Lee, Desmond R. Lim, Lionel C. Kimerling et al. · Optics Letters · 2001 · 557 citations

, , +12

Materials processing by gas cluster ion beams

Isao Yamada · Materials Science and Engineering R Reports · 2001 · 453 citations

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Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model

Kevin C. Lee, Desmond R. Lim, Hsin-Chiao Luan et al. · Applied Physics Letters · 2000 · 432 citations

, , +17

Theoretical investigation of a two-dimensional photonic crystal slab with truncated cone air holes

Yoshinori Tanaka, Takashi Asano, Yoshihiro Akahane et al. · Applied Physics Letters · 2003 · 133 citations

, , +15